GlobalFoundries可出品零缺陷晶圆-快科技-科技改变生活

GlobalFoundries可出品零缺陷晶圆

Skyangeles
2010年03月22日 17:02
0

BSN网站记者近日造访GlobalFoundries位于德国德累斯顿的Fab 1晶圆厂（原AMD Fab 36），对其无尘室进行了一次参观。让他们大吃一惊的是，GlobalFoundries居然能够造出完全无缺陷的芯片晶圆。

早在未拆分前，AMD的晶圆良品率在业内就颇具口碑，甚至经常有消息称其良品率领先于Intel。现在，GlobalFoundries的德累斯顿工厂结合了AMD的传统和“德国工艺”，晶圆良品率依然保持在非常高的水平上。比如记者在工厂中看到的32nm SOI工艺以及28nm体硅测试晶圆，良品率都相当高。有的28nm体硅测试晶圆只有几十处缺陷，良品率肯定远高于近期备受诟病的台积电40nm生产线。

更令人赞叹的是，记者在GlobalFoundries工厂内还看到了多块良品率高达100%的晶圆，以及更多缺陷数仅为个位数的高良品率晶圆，并且这些晶圆都是用于制造业已商品化的产品，而非测试用途。在一块300mm晶圆上找不到一处缺陷，数千亿个晶体管电路都可正常运行，这绝对是晶圆制造的终极目标。

Fab 1总经理Udo Nothelfer

32nm SOI测试晶圆

28nm体硅测试晶圆

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