ASML EUV光刻机更强了：薄膜透光率首超90%-快科技-科技改变生活

ASML EUV光刻机更强了：薄膜透光率首超90%

万南
2021年05月13日 17:13
0

日前在韩国的一场半导体交流活动中，ASML韩国营销经理MyoungKuy Lee透露，公司将开始供应透光率超90%的薄膜，以提升EUV光刻机的效率。

据悉，这款薄膜是ASML与Teradyne（泰瑞达）联合研发，日本三井化学代工，已经通过了400瓦测试。

ASML 2016年首次开发出光罩薄膜，当时的透光率是78%。随后在2018年，薄膜透光率提升到80%，去年提升到85%。

薄膜用于保护光罩免受污染，单价2.6万美元左右（约合人民币16.78万元）。

另外，韩国企业FST、S&S Tech也都在紧张开发EUV光刻机所需的薄膜，FST此前预期上半年开始供应90%透光率的碳化硅薄膜。

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#阿斯麦 #极紫外光刻

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